【英文标准名称】:Microbeamanalysis-Quantitativeanalysisusingenergy-dispersivespectrometry(EDS)
【原文标准名称】:微电子束分析.用能量散射光谱仪(EDS)进行定量分析
【标准号】:ISO22309-2006
【标准状态】:作废
【国别】:国际
【发布日期】:2006-04
【实施或试行日期】:
【发布单位】:国际标准化组织(IX-ISO)
【起草单位】:ISO/TC202
【标准类型】:()
【标准水平】:()
【中文主题词】:分析方法;定义;电子束;电子显微镜;能量分散;微量分析;定量分析;试样制备;光谱测定法;光谱学
【英文主题词】:Analysismethods;Definition;Definitions;Electronbeams;Electronmicroscopes;Energydispersiv;Methodsofanalysis;Microanalysis;Quantitativeanalysis;Specimenpreparation;Spectrometry;Spectroscopy
【摘要】:ThisInternationalStandardgivesguidanceonthequantitativeanalysisatspecificpointsorareasofaspecimenusingenergy-dispersivespectrometry(EDS)fittedtoascanningelectronmicroscope(SEM)orelectronprobemicroanalyser(EPMA);anyexpressionofamount,i.e.intermsofpercent(massfraction),aslarge/smallormajor/minoramountsisdeemedtobequantitative.ThecorrectidentificationofallelementspresentinthespecimenisanecessarypartofquantitativeanalysisandisthereforeconsideredinthisInternationalStandard.ThisInternationalStandardprovidesguidanceonthevariousapproachesandisapplicabletoroutinequantitativeanalysisofmassfractionsdownto1%,utilisingeitherreferencematerialsor"standardless"procedures.ItcanbeusedwithconfidenceforelementswithatomicnumberZ>10.GuidanceontheanalysisoflightelementswithZ<11isalsogiven.NOTEWithcare,massfractionsaslowas0,1%aremeasurablewhenthereisnopeakoverlapandtherelevantcharacteristiclineisstronglyexcited.ThisInternationalStandardappliesprincipallytoquantitativeanalysesonaflatpolishedspecimensurface.Thebasicproceduresarealsoapplicabletotheanalysisofspecimensthatdonothaveapolishedsurfacebutadditionaluncertaintycomponentswillbeintroduced.ThereisnoacceptedmethodforaccuratequantitativeEDSanalysisoflightelements.However,severalEDSmethodsdoexist.Thesearethefollowing.a)Measuringpeakareasandcomparingintensitiesinthesamewayasforheavierelements.ForthereasonsexplainedinAnnexD,theuncertaintyandinaccuracyassociatedwiththeresultsforlightelementswillbegreaterthanfortheheavierelements.b)Wherethelightelementisknowntobecombinedstoichiometricallywithheavierelements(Z>10)inthespecimen,itsconcentrationcanbedeterminedbysummingtheappropriateproportionsofconcentrationsoftheotherelements.Thisisoftenusedfortheanalysisofoxygeninsilicatemineralspecimens.c)Calculationofconcentrationbydifferencewherethelightelementpercentageis100%minusthepercentagesumoftheanalysedelements.Thismethodisonlypossiblewithgoodbeam-currentstabilityandaseparatemeasurementofatleastonereferencespecimenanditrequiresveryaccurateanalysisoftheotherelementsinthespecimen.AnnexDsummarisestheproblemsoflightelementanalysis,additionaltothosethatexistforquantitativeanalysisoftheheavierelements.IfbothEDSandwavelengthspectrometry(WDS)areavailable,thenWDScanbeusedtoovercometheproblemsofpeakoverlapthatoccurwithEDSatlowenergies.However,manyoftheotherissuesarecommontobothtechniques.
【中国标准分类号】:N55
【国际标准分类号】:71_040_50
【页数】:23P.;A4
【正文语种】:英语